Assuming you have ruled out bugs, then this is most likely little burn spot. Are you are misting the plant with your lights on. The led lights are pretty powerful and can magnify the water droplets causing burns. Good luck with the rest of your grow!
Just from what is shown it could be thrips as well as I see no webbing from mites.
Spinosad spray will get rid of either.
Check Lex Blazer on youtube he had a good series on pests.
I do not see spider mite damage but they do look like eggs of some sort. If you have anything higher power, see if the spots have any legs, antenna, etc. I personally would hit your plants with a mild insecticidal soap before going to miticides as over use of mitcides leads to pest developing immunity/resistance (THE BORG).You will have to spray every other day for a week or so with the soap and see if they come back.
If you start noticing speckled damage on leaves or twisting new growth, next level treatments may be needed.
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